Reduction gears play a crucial role in semiconductor equipment, serving as the core transmission components for achieving high-precision and high-stability motion control. Due to the extremely stringent requirements for precision, cleanliness, and reliability in the semiconductor manufacturing process, reduction gears must be capable of providing positioning accuracy at the micron or even nanometer level, and must operate stably for extended periods in vacuum or clean environments.
Main application links
Reduction gears are widely used in various aspects of semiconductor manufacturing, including:
Wafer manufacturing: In processes such as wafer handling, lithography, etching, and cleaning, gear reducers drive precision motion platforms to ensure accurate positioning and stable transmission of wafers. For example, in lithography machines, gear reducers control the nanometer-level movement of lenses and wafer stages, directly affecting exposure accuracy.
Chip packaging: In equipment such as pick-and-place machines, wire bonding machines, and sorting machines, reducers provide high torque and high-precision motion control to ensure that chips are accurately and non-destructively placed and connected.
Testing phase: In the chip testing equipment, the reducer drives the probe card to make precise contact and movement, ensuring the accuracy and repeatability of the test data.
Material Handling: Semiconductor cranes (AGVs or overhead cranes) utilize high-precision reducers to handle heavy materials such as wafer cassettes and equipment, ensuring safety and positioning accuracy during the handling process.